Fabrication of SMD 32.768 kHz tuning fork-type crystals: Photolithography and selective etching of an array of quartz tuning fork resonators: Fid-Bau Portal

Fabrication of SMD 32.768 kHz tuning fork-type crystals: Photolithography and selective etching of an array of quartz tuning fork resonators

Lee, S. / Lee, J.-Y. / Park, T.-S.

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Fabrication of SMD 32.768 kHz tuning fork-type crystals: Photolithography and selective etching of an array of quartz tuning fork resonators

Lee, S. / Lee, J.-Y. / Park, T.-S.

Fabrication of SMD 32.768 kHz tuning fork-type crystals: Photolithography and selective etching of an array of quartz tuning fork resonators

Lee, S. / Lee, J.-Y. / Park, T.-S.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

Title:

Fabrication of SMD 32.768 kHz tuning fork-type crystals: Photolithography and selective etching of an array of quartz tuning fork resonators

Contributors:

Lee, S. (author) / Lee, J.-Y. (author) / Park, T.-S. (author)

Published in:

WERKSTOFFE UND KORROSION -WEINHEIM- ; 52 ; 712-715

Publication date:

2001-01-01

Size:

4 pages

ISSN:

0043-2822

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11223

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Development of SMD 32.768 kHz tuning fork-type crystals Part IV: Finite element method design of quartz tuning fork resonators - Significant design parameters affecting motional capacitance C~1

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Zhang, Z. / Jia, S. / Ma, B. et al. | British Library Online Contents | 2015

Quartz Crystal Double-Ended Tuning Fork Resonator for High Resolution Force Sensing

Wang, J. / Zhao, C. / Zhang, S.M. et al. | British Library Online Contents | 2014