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    Amorphous molecular materials: development of novel negative electron-beam molecular resists

    New search for: Kadota, T.
    New search for: Kageyama, H.
    New search for: Wakaya, F.
    New search for: Gamo, K.
    New search for: Shirota, Y.

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    Amorphous molecular materials: development of novel negative electron-beam molecular resists

    New search for: Kadota, T.
    New search for: Kageyama, H.
    New search for: Wakaya, F.
    New search for: Gamo, K.
    New search for: Shirota, Y.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Amorphous molecular materials: development of novel negative electron-beam molecular resists

    New search for: Kadota, T.
    New search for: Kageyama, H.
    New search for: Wakaya, F.
    New search for: Gamo, K.
    New search for: Shirota, Y.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Amorphous molecular materials: development of novel negative electron-beam molecular resists

    Contributors:

    Kadota, T. (author) / Kageyama, H. (author) / Wakaya, F. (author) / Gamo, K. (author) / Shirota, Y. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING -AMSTERDAM THEN LAUSANNE- C ; 16 ; 91-94

    Publication date:

    2001-01-01

    Size:

    4 pages

    ISSN:

    0928-4931

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.1 / 660

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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