Direct Writing of Patterned Ceramics Using Electron-Beam Lithography and Metallopolymer Resists: Fid-Bau Portal

Direct Writing of Patterned Ceramics Using Electron-Beam Lithography and Metallopolymer Resists

Clendenning, S. B. / Aouba, S. / Rayat, M. S. / Grozea, D. / Sorge, J. B. / Brodersen, P. M. / Sodhi, R. N. S. / Lu, Z.-H. / Yip, C. M. / Freeman, M. R.

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Direct Writing of Patterned Ceramics Using Electron-Beam Lithography and Metallopolymer Resists

Clendenning, S. B. / Aouba, S. / Rayat, M. S. / Grozea, D. / Sorge, J. B. / Brodersen, P. M. / Sodhi, R. N. S. / Lu, Z.-H. / Yip, C. M. / Freeman, M. R.

Direct Writing of Patterned Ceramics Using Electron-Beam Lithography and Metallopolymer Resists

Clendenning, S. B. / Aouba, S. / Rayat, M. S. / Grozea, D. / Sorge, J. B. / Brodersen, P. M. / Sodhi, R. N. S. / Lu, Z.-H. / Yip, C. M. / Freeman, M. R.

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Order at Subito €

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Document information

Title:

Direct Writing of Patterned Ceramics Using Electron-Beam Lithography and Metallopolymer Resists

Contributors:

Clendenning, S. B. (author) / Aouba, S. (author) / Rayat, M. S. (author) / Grozea, D. (author) / Sorge, J. B. (author) / Brodersen, P. M. (author) / Sodhi, R. N. S. (author) / Lu, Z.-H. (author) / Yip, C. M. (author) / Freeman, M. R. (author)

Published in:

ADVANCED MATERIALS -DEERFIELD BEACH THEN WEINHEIM- ; 16 ; 215-229

Publication date:

2004-01-01

Size:

15 pages

ISSN:

0935-9648

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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