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Controlled synthesis of aligned carbon nanotube arrays on catalyst patterned silicon substrates by plasma-enhanced chemical vapor deposition

Wang, H. / Lin, J. / Huan, C. H. / Dong, P. / He, J. / Tang, S. H. / Eng, W. K. / Thong, T. L.

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Controlled synthesis of aligned carbon nanotube arrays on catalyst patterned silicon substrates by plasma-enhanced chemical vapor deposition

Wang, H. / Lin, J. / Huan, C. H. / Dong, P. / He, J. / Tang, S. H. / Eng, W. K. / Thong, T. L.

Controlled synthesis of aligned carbon nanotube arrays on catalyst patterned silicon substrates by plasma-enhanced chemical vapor deposition

Wang, H. / Lin, J. / Huan, C. H. / Dong, P. / He, J. / Tang, S. H. / Eng, W. K. / Thong, T. L.

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Order at Subito €

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Document information

Title:

Controlled synthesis of aligned carbon nanotube arrays on catalyst patterned silicon substrates by plasma-enhanced chemical vapor deposition

Contributors:

Wang, H. (author) / Lin, J. (author) / Huan, C. H. (author) / Dong, P. (author) / He, J. (author) / Tang, S. H. (author) / Eng, W. K. (author) / Thong, T. L. (author)

Published in:

APPLIED SURFACE SCIENCE ; 181 ; 248-254

Publication date:

2001-01-01

Size:

7 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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