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Wet and dry etching of Sc2O3
Wet and dry etching of Sc2O3
Wet and dry etching of Sc2O3
Park, P. Y. (author) / Norasetthekul, S. (author) / Lee, K. P. (author) / Baik, K. H. (author) / Gila, B. P. (author) / Shin, J. H. (author) / Abernathy, C. R. (author) / Ren, F. (author) / Lambers, E. S. (author) / Pearton, S. J. (author)
APPLIED SURFACE SCIENCE ; 185 ; 52-59
2001-01-01
8 pages
Article (Journal)
English
DDC:
621.35
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