Wet and dry etching of Sc2O3: Fid-Bau Portal

Wet and dry etching of Sc2O3

Park, P. Y. / Norasetthekul, S. / Lee, K. P. / Baik, K. H. / Gila, B. P. / Shin, J. H. / Abernathy, C. R. / Ren, F. / Lambers, E. S. / Pearton, S. J.

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Wet and dry etching of Sc2O3

Park, P. Y. / Norasetthekul, S. / Lee, K. P. / Baik, K. H. / Gila, B. P. / Shin, J. H. / Abernathy, C. R. / Ren, F. / Lambers, E. S. / Pearton, S. J.

Wet and dry etching of Sc2O3

Park, P. Y. / Norasetthekul, S. / Lee, K. P. / Baik, K. H. / Gila, B. P. / Shin, J. H. / Abernathy, C. R. / Ren, F. / Lambers, E. S. / Pearton, S. J.

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Document information

Title:

Wet and dry etching of Sc2O3

Contributors:

Park, P. Y. (author) / Norasetthekul, S. (author) / Lee, K. P. (author) / Baik, K. H. (author) / Gila, B. P. (author) / Shin, J. H. (author) / Abernathy, C. R. (author) / Ren, F. (author) / Lambers, E. S. (author) / Pearton, S. J. (author)

Published in:

APPLIED SURFACE SCIENCE ; 185 ; 52-59

Publication date:

2001-01-01

Size:

8 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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