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Mass spectroscopy analysis during the deposition of a-SiC:H and a-C:H films produced by hot wire and hot wire plasma-assisted techniques
Mass spectroscopy analysis during the deposition of a-SiC:H and a-C:H films produced by hot wire and hot wire plasma-assisted techniques
Mass spectroscopy analysis during the deposition of a-SiC:H and a-C:H films produced by hot wire and hot wire plasma-assisted techniques
Ferreira, I. (author) / Silva, V. (author) / Aguas, H. (author) / Fortunato, E. (author) / Martins, R. (author)
APPLIED SURFACE SCIENCE ; 184 ; 60-65
2001-01-01
6 pages
Article (Journal)
English
DDC:
621.35
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