Silicon carbide alloys produced by hot wire, hot wire plasma-assisted and plasma-enhanced CVD techniques: Fid-Bau Portal

Silicon carbide alloys produced by hot wire, hot wire plasma-assisted and plasma-enhanced CVD techniques

Ferreira, I. / Costa, M. E. / Pereira, L. / Fortunato, E. / Martins, R. / Ramos, A. R. / Silva, M. F.

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Silicon carbide alloys produced by hot wire, hot wire plasma-assisted and plasma-enhanced CVD techniques

Ferreira, I. / Costa, M. E. / Pereira, L. / Fortunato, E. / Martins, R. / Ramos, A. R. / Silva, M. F.

Silicon carbide alloys produced by hot wire, hot wire plasma-assisted and plasma-enhanced CVD techniques

Ferreira, I. / Costa, M. E. / Pereira, L. / Fortunato, E. / Martins, R. / Ramos, A. R. / Silva, M. F.

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Check availability in my library

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Document information

Title:

Silicon carbide alloys produced by hot wire, hot wire plasma-assisted and plasma-enhanced CVD techniques

Contributors:

Ferreira, I. (author) / Costa, M. E. (author) / Pereira, L. (author) / Fortunato, E. (author) / Martins, R. (author) / Ramos, A. R. (author) / Silva, M. F. (author)

Published in:

APPLIED SURFACE SCIENCE ; 184 ; 8-19

Publication date:

2001-01-01

Size:

12 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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