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    Microelectromechanical systems (MEMS): fabrication, design and applications

    New search for: Judy, J. W.

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    Microelectromechanical systems (MEMS): fabrication, design and applications

    New search for: Judy, J. W.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Microelectromechanical systems (MEMS): fabrication, design and applications

    New search for: Judy, J. W.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
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    Document information
    Title:

    Microelectromechanical systems (MEMS): fabrication, design and applications

    Contributors:

    Judy, J. W. (author)

    Published in:

    Special Issue on Space Applications for MEMS ; 1115-1134

    SMART MATERIALS AND STRUCTURES ; 10

    Publication date:

    2001-01-01

    Size:

    20 pages

    ISSN:

    0964-1726

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  530

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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