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Computer-aided design for microelectromechanical systems (MEMS)

Lee, Y.C. / McCarthy, B. / Diao, J. / Zhang, Z. / Harsh, K.F.

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Computer-aided design for microelectromechanical systems (MEMS)

Lee, Y.C. / McCarthy, B. / Diao, J. / Zhang, Z. / Harsh, K.F.

Computer-aided design for microelectromechanical systems (MEMS)

Lee, Y.C. / McCarthy, B. / Diao, J. / Zhang, Z. / Harsh, K.F.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Computer-aided design for microelectromechanical systems (MEMS)

Contributors:

Lee, Y.C. (author) / McCarthy, B. (author) / Diao, J. (author) / Zhang, Z. (author) / Harsh, K.F. (author)

Published in:

International journal of material & product technology ; 18 ; 356-380

Publication date:

2003-01-01

Size:

25 pages

ISSN:

0268-1900

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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