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Nanocrystalline diamond thin films deposited by 35 kHz Ar-rich plasmas

Lopez, J. M. / Gordillo-Vazquez, F. J. / Albella, J. M.

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Nanocrystalline diamond thin films deposited by 35 kHz Ar-rich plasmas

Lopez, J. M. / Gordillo-Vazquez, F. J. / Albella, J. M.

Nanocrystalline diamond thin films deposited by 35 kHz Ar-rich plasmas

Lopez, J. M. / Gordillo-Vazquez, F. J. / Albella, J. M.

Access

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Nanocrystalline diamond thin films deposited by 35 kHz Ar-rich plasmas

Contributors:

Lopez, J. M. (author) / Gordillo-Vazquez, F. J. (author) / Albella, J. M. (author)

Published in:

APPLIED SURFACE SCIENCE ; 185 ; 321-325

Publication date:

2002-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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