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Characteristics of aluminum-implanted 6H-SiC samples after different thermal treatments
Characteristics of aluminum-implanted 6H-SiC samples after different thermal treatments
Characteristics of aluminum-implanted 6H-SiC samples after different thermal treatments
Ottaviani, L. (author) / Lazar, M. (author) / Locatelli, M. L. (author) / Planson, D. (author) / Chante, J. P. (author) / Dubois, C. (author)
MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 90 ; 301 - 308
2002-01-01
8 pages
Article (Journal)
English
DDC:
620.11
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