Synthesis of superhard and elastic carbon nitride films by filtered cathodic vacuum arc combined with radio frequency ion beam source: Fid-Bau Portal

Synthesis of superhard and elastic carbon nitride films by filtered cathodic vacuum arc combined with radio frequency ion beam source

Cheng, Y. H. / Tay, B. K. / Lau, S. P. / Shi, X. / Qiao, X. L. / Chen, J. G. / Wu, Y. P. / Sun, Z. H. / Xie, C. S.

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Synthesis of superhard and elastic carbon nitride films by filtered cathodic vacuum arc combined with radio frequency ion beam source

Cheng, Y. H. / Tay, B. K. / Lau, S. P. / Shi, X. / Qiao, X. L. / Chen, J. G. / Wu, Y. P. / Sun, Z. H. / Xie, C. S.

Synthesis of superhard and elastic carbon nitride films by filtered cathodic vacuum arc combined with radio frequency ion beam source

Cheng, Y. H. / Tay, B. K. / Lau, S. P. / Shi, X. / Qiao, X. L. / Chen, J. G. / Wu, Y. P. / Sun, Z. H. / Xie, C. S.

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Document information

Title:

Synthesis of superhard and elastic carbon nitride films by filtered cathodic vacuum arc combined with radio frequency ion beam source

Contributors:

Cheng, Y. H. (author) / Tay, B. K. (author) / Lau, S. P. (author) / Shi, X. (author) / Qiao, X. L. (author) / Chen, J. G. (author) / Wu, Y. P. (author) / Sun, Z. H. (author) / Xie, C. S. (author)

Published in:

JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 17 ; 521-524

Publication date:

2002-01-01

Size:

4 pages

ISSN:

0884-2914

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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Study of TiN films by filtered cathodic vacuum arc techniques

Tay, B. K. / Shi, X. / Yang, H. S. et al. | British Library Online Contents | 1999

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Chen, B. J. / Sun, X. W. / Tay, B. K. | British Library Online Contents | 2004

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