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Review of metal oxide films deposited by filtered cathodic vacuum arc technique

Tay, B. K. / Zhao, Z. W. / Chua, D. H.

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Review of metal oxide films deposited by filtered cathodic vacuum arc technique

Tay, B. K. / Zhao, Z. W. / Chua, D. H.

Review of metal oxide films deposited by filtered cathodic vacuum arc technique

Tay, B. K. / Zhao, Z. W. / Chua, D. H.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Review of metal oxide films deposited by filtered cathodic vacuum arc technique

Contributors:

Tay, B. K. (author) / Zhao, Z. W. (author) / Chua, D. H. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING R REPORTS -LAUSANNE- ; 52 ; 1-48

Publication date:

2006-01-01

Size:

48 pages

ISSN:

0927-796X

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.1 / 530

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