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Subcritical crack growth in single-crystal silicon using micromachined specimens

Fitzgerald, A. M. / Iyer, R. S. / Dauskardt, R. H. / Kenny, T. W.

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Subcritical crack growth in single-crystal silicon using micromachined specimens

Fitzgerald, A. M. / Iyer, R. S. / Dauskardt, R. H. / Kenny, T. W.

Subcritical crack growth in single-crystal silicon using micromachined specimens

Fitzgerald, A. M. / Iyer, R. S. / Dauskardt, R. H. / Kenny, T. W.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Subcritical crack growth in single-crystal silicon using micromachined specimens

Contributors:

Fitzgerald, A. M. (author) / Iyer, R. S. (author) / Dauskardt, R. H. (author) / Kenny, T. W. (author)

Published in:

JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 17 ; 683-692

Publication date:

2002-01-01

Size:

10 pages

ISSN:

0884-2914

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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