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    Cathodoluminescence study on the tilt and twist boundaries in bonded silicon wafers

    New search for: Sekiguchi, T.
    New search for: Ito, S.
    New search for: Kanai, A.

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    Cathodoluminescence study on the tilt and twist boundaries in bonded silicon wafers

    New search for: Sekiguchi, T.
    New search for: Ito, S.
    New search for: Kanai, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Cathodoluminescence study on the tilt and twist boundaries in bonded silicon wafers

    New search for: Sekiguchi, T.
    New search for: Ito, S.
    New search for: Kanai, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Cathodoluminescence study on the tilt and twist boundaries in bonded silicon wafers

    Contributors:

    Sekiguchi, T. (author) / Ito, S. (author) / Kanai, A. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 91-92 ; 244 - 247

    Publication date:

    2002-01-01

    Size:

    4 pages

    ISSN:

    0921-5107

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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