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Investigation of electrically active defects in Si-based semiconductor structures

Popov, V. M. / Klimenko, A. S. / Pokanevich, A. P.

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Investigation of electrically active defects in Si-based semiconductor structures

Popov, V. M. / Klimenko, A. S. / Pokanevich, A. P.

Investigation of electrically active defects in Si-based semiconductor structures

Popov, V. M. / Klimenko, A. S. / Pokanevich, A. P.

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Access via TIB

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Order at Subito €

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Document information

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Document information

Title:

Investigation of electrically active defects in Si-based semiconductor structures

Contributors:

Popov, V. M. (author) / Klimenko, A. S. (author) / Pokanevich, A. P. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 91-92 ; 248 - 252

Publication date:

2002-01-01

Size:

5 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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