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Photoenhanced wet chemical etching of n+-doped GaN

Skriniarova, J. / van der Hart, A. / Bochem, H. P. / Fox, A. / Kordos, P.

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Photoenhanced wet chemical etching of n+-doped GaN

Skriniarova, J. / van der Hart, A. / Bochem, H. P. / Fox, A. / Kordos, P.

Photoenhanced wet chemical etching of n+-doped GaN

Skriniarova, J. / van der Hart, A. / Bochem, H. P. / Fox, A. / Kordos, P.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Photoenhanced wet chemical etching of n+-doped GaN

Contributors:

Skriniarova, J. (author) / van der Hart, A. (author) / Bochem, H. P. (author) / Fox, A. (author) / Kordos, P. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 91-92 ; 298 - 302

Publication date:

2002-01-01

Size:

5 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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