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Defect specific topography of GaAs wafers by microwave-detected photo induced current transient spectroscopy
Defect specific topography of GaAs wafers by microwave-detected photo induced current transient spectroscopy
Defect specific topography of GaAs wafers by microwave-detected photo induced current transient spectroscopy
Grundig-Wendrock, B. (author) / Jurisch, M. (author) / Niklas, J. R. (author)
MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 91-92 ; 371 - 375
2002-01-01
5 pages
Article (Journal)
English
DDC:
620.11
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