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Materials Characterization of Alternative Gate Dielectrics
Materials Characterization of Alternative Gate Dielectrics
Materials Characterization of Alternative Gate Dielectrics
Busch, B. W. (author) / Pluchery, O. (author) / Chabal, Y. J. (author) / Muller, D. A. (author) / Opila, R. L. (author) / Kwo, J. R. (author) / Garfunkel, E. (author)
MRS BULLETIN- MATERIALS RESEARCH SOCIETY ; 27 ; 206-211
2002-01-01
6 pages
Article (Journal)
English
DDC:
620.11
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