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A Thermodynamic Approach to Selecting Alternative Gate Dielectrics

Schlom, D. G. / Haeni, J. H.

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A Thermodynamic Approach to Selecting Alternative Gate Dielectrics

Schlom, D. G. / Haeni, J. H.

A Thermodynamic Approach to Selecting Alternative Gate Dielectrics

Schlom, D. G. / Haeni, J. H.

Access

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

A Thermodynamic Approach to Selecting Alternative Gate Dielectrics

Contributors:

Schlom, D. G. (author) / Haeni, J. H. (author)

Published in:

MRS BULLETIN- MATERIALS RESEARCH SOCIETY ; 27 ; 198-205

Publication date:

2002-01-01

Size:

8 pages

ISSN:

0883-7694

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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