Pulsed laser deposition of TiO2 for MOS gate dielectric: Fid-Bau Portal

Fachinformationsdienst BAUdigital

A platform for research: civil engineering, architecture and urbanism

Pulsed laser deposition of TiO2 for MOS gate dielectric

Paily, R. / DasGupta, A. / DasGupta, N. / Bhattacharya, P. / Misra, P. / Ganguli, T. / Kukreja, L. M. / Balamurugan, A. K. / Rajagopalan, S. / Tyagi, A. K.

Access

Check availability in my library

Order at Subito €

Page navigation

Document information

Export, share and cite

Pulsed laser deposition of TiO2 for MOS gate dielectric

Paily, R. / DasGupta, A. / DasGupta, N. / Bhattacharya, P. / Misra, P. / Ganguli, T. / Kukreja, L. M. / Balamurugan, A. K. / Rajagopalan, S. / Tyagi, A. K.

Pulsed laser deposition of TiO2 for MOS gate dielectric

Paily, R. / DasGupta, A. / DasGupta, N. / Bhattacharya, P. / Misra, P. / Ganguli, T. / Kukreja, L. M. / Balamurugan, A. K. / Rajagopalan, S. / Tyagi, A. K.

Access

Check availability in my library

Order at Subito €

Page navigation

Document information

Export, share and cite

Document information

Title:

Pulsed laser deposition of TiO2 for MOS gate dielectric

Contributors:

Paily, R. (author) / DasGupta, A. (author) / DasGupta, N. (author) / Bhattacharya, P. (author) / Misra, P. (author) / Ganguli, T. (author) / Kukreja, L. M. (author) / Balamurugan, A. K. (author) / Rajagopalan, S. (author) / Tyagi, A. K. (author)

Published in:

APPLIED SURFACE SCIENCE ; 187 ; 297-304

Publication date:

2002-01-01

Size:

8 pages

ISSN:

Type of media:

Article (Journal)

Type of material:

Print

Language:

English

Classification:

© Metadata Copyright the British Library Board and other contributors. All rights reserved.

Similar titles

Deposition of Au/TiO2 film by pulsed laser

Zhao, C. / Zhao, Q. / Qiu, J. et al. | British Library Online Contents | 2006

Femtosecond pulsed laser deposition of nanostructured TiO2 films

Sanz, M. / Walczak, M. / de Nalda, R. et al. | British Library Online Contents | 2009

Photocatalytic TiO2 thin-films deposited by a pulsed laser deposition technique

Terashima, M. / Inoue, N. / Kashiwabara, S. et al. | British Library Online Contents | 2001

Fabrication of nanoparticles of anatase TiO2 by oxygen-supplied pulsed laser deposition

Okubo, N. / Nakazawa, T. / Katano, Y. et al. | British Library Online Contents | 2002

Preparation of Pt/TiO2 nanocomposite films by 2-beam pulsed laser deposition

Sasaki, T. / Beck, K. M. / Koshizakai, N. | British Library Online Contents | 2002