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Screw and edge dislocations-induced internal strain around micropipes of 6H-SiC single crystals
Screw and edge dislocations-induced internal strain around micropipes of 6H-SiC single crystals
Screw and edge dislocations-induced internal strain around micropipes of 6H-SiC single crystals
Ohsato, H. (author) / Kato, T. (author) / Okuda, T. (author)
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 4 ; 483-487
2001-01-01
5 pages
Article (Journal)
English
DDC:
621.38152
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