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Specific features of submicron-rule IC topology features

Voitekh, S. N. / Kolesnik, I. I. / Rusetskii, A. M.

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Specific features of submicron-rule IC topology features

Voitekh, S. N. / Kolesnik, I. I. / Rusetskii, A. M.

Specific features of submicron-rule IC topology features

Voitekh, S. N. / Kolesnik, I. I. / Rusetskii, A. M.

Access

Access via TIB

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Order at Subito €

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Document information

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Document information

Title:

Specific features of submicron-rule IC topology features

Contributors:

Voitekh, S. N. (author) / Kolesnik, I. I. (author) / Rusetskii, A. M. (author)

Published in:

SURFACE ENGINEERING AND APPLIED ELECTROCHEMISTRY C/C OF ELEKTRONNAIA OBRABOTKA MATERIALOV ; 30-35

Publication date:

2000-01-01

Size:

6 pages

ISSN:

1068-3755

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.44 / 660.297

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