Growth of 3-inch Diameter 6H-SiC Single Crystals by Sublimation Physical Vapor Transport: Fid-Bau Portal

Growth of 3-inch Diameter 6H-SiC Single Crystals by Sublimation Physical Vapor Transport

Wang, S. / Sanchez, E. K. / Kopec, A. / Poplawski, S. / Ware, R. / Holmes, S. / Balkas, C. M. / Timmerman, A. G.

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Growth of 3-inch Diameter 6H-SiC Single Crystals by Sublimation Physical Vapor Transport

Wang, S. / Sanchez, E. K. / Kopec, A. / Poplawski, S. / Ware, R. / Holmes, S. / Balkas, C. M. / Timmerman, A. G.

Growth of 3-inch Diameter 6H-SiC Single Crystals by Sublimation Physical Vapor Transport

Wang, S. / Sanchez, E. K. / Kopec, A. / Poplawski, S. / Ware, R. / Holmes, S. / Balkas, C. M. / Timmerman, A. G.

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Title:

Growth of 3-inch Diameter 6H-SiC Single Crystals by Sublimation Physical Vapor Transport

Contributors:

Wang, S. (author) / Sanchez, E. K. (author) / Kopec, A. (author) / Poplawski, S. (author) / Ware, R. (author) / Holmes, S. (author) / Balkas, C. M. (author) / Timmerman, A. G. (author)

Published in:

MATERIALS SCIENCE FORUM ; 389/393 ; 35-38

Publication date:

2002-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Anderson, T. / Barrett, D. / Chen, J. et al. | British Library Online Contents | 2005

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Anderson, T. A. / Barrett, D. L. / Chen, J. et al. | British Library Online Contents | 2004

Physical Vapor Growth and Characterization of High Conductivity 1.4 Inch 4H-SiC Bulk Crystals

Mueller, S. G. / Eckstein, R. / Hartung, W. et al. | British Library Online Contents | 1998

Sublimation Growth of 50mm Diameter SiC Wafers

Powell, A. R. / Wang, S. / Fechko, G. et al. | British Library Online Contents | 1998

Transport phenomena in sublimation growth of SiC bulk crystals

Segal, A.S. / Vorob'ev, A.N. / Karpov, S.Y. et al. | British Library Online Contents | 1999