Comparative Study of Heteroepitaxially and Homoepitaxially Grown 3C-SiC Films: Fid-Bau Portal

Comparative Study of Heteroepitaxially and Homoepitaxially Grown 3C-SiC Films

Takahashi, T. / Ishida, Y. / Tsuchida, H. / Kamata, I. / Okumura, H. / Yoshida, S. / Arai, K.

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Comparative Study of Heteroepitaxially and Homoepitaxially Grown 3C-SiC Films

Takahashi, T. / Ishida, Y. / Tsuchida, H. / Kamata, I. / Okumura, H. / Yoshida, S. / Arai, K.

Comparative Study of Heteroepitaxially and Homoepitaxially Grown 3C-SiC Films

Takahashi, T. / Ishida, Y. / Tsuchida, H. / Kamata, I. / Okumura, H. / Yoshida, S. / Arai, K.

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Document information

Title:

Comparative Study of Heteroepitaxially and Homoepitaxially Grown 3C-SiC Films

Contributors:

Takahashi, T. (author) / Ishida, Y. (author) / Tsuchida, H. (author) / Kamata, I. (author) / Okumura, H. (author) / Yoshida, S. (author) / Arai, K. (author)

Published in:

MATERIALS SCIENCE FORUM ; 389/393 ; 323-326

Publication date:

2002-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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