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Improved SiCOI Structures Elaborated by Heteroepitaxy of 3C-SiC on SOI
Improved SiCOI Structures Elaborated by Heteroepitaxy of 3C-SiC on SOI
Improved SiCOI Structures Elaborated by Heteroepitaxy of 3C-SiC on SOI
Chassagne, T. (author) / Ferro, G. (author) / Wang, H. (author) / Stoemenos, Y. (author) / Peyre, H. (author) / Contreras, S. (author) / Camassel, J. (author) / Monteil, Y. (author) / Ghyselen, B. (author)
MATERIALS SCIENCE FORUM ; 389/393 ; 343-346
2002-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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