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Optical Characterization of Ion-Implanted 4H-SiC
Optical Characterization of Ion-Implanted 4H-SiC
Optical Characterization of Ion-Implanted 4H-SiC
Feng, Z. C. (author) / Yan, F. (author) / Chang, W. Y. (author) / Zhao, J. H. (author) / Lin, J. (author)
MATERIALS SCIENCE FORUM ; 389/393 ; 647-650
2002-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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