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Laser annealing of Al implanted silicon carbide: Structural and optical characterization
Laser annealing of Al implanted silicon carbide: Structural and optical characterization
Laser annealing of Al implanted silicon carbide: Structural and optical characterization
Boutopoulos, C. (author) / Terzis, P. (author) / Zergioti, I. (author) / Kontos, A. G. (author) / Zekentes, K. (author) / Giannakopoulos, K. (author) / Raptis, Y. S. (author)
APPLIED SURFACE SCIENCE ; 253 ; 7912-7916
2007-01-01
5 pages
Article (Journal)
English
DDC:
621.35
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