Quantitative High-Resolution Two-Dimensional Profiling of SiC by Scanning Capacitance Microscopy: Fid-Bau Portal

Quantitative High-Resolution Two-Dimensional Profiling of SiC by Scanning Capacitance Microscopy

Raineri, V. / Giannazzo, F. / Calcagno, L. / Musumeci, P. / Roccaforte, F. / La Via, F.

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Quantitative High-Resolution Two-Dimensional Profiling of SiC by Scanning Capacitance Microscopy

Raineri, V. / Giannazzo, F. / Calcagno, L. / Musumeci, P. / Roccaforte, F. / La Via, F.

Quantitative High-Resolution Two-Dimensional Profiling of SiC by Scanning Capacitance Microscopy

Raineri, V. / Giannazzo, F. / Calcagno, L. / Musumeci, P. / Roccaforte, F. / La Via, F.

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Title:

Quantitative High-Resolution Two-Dimensional Profiling of SiC by Scanning Capacitance Microscopy

Contributors:

Raineri, V. (author) / Giannazzo, F. (author) / Calcagno, L. (author) / Musumeci, P. (author) / Roccaforte, F. (author) / La Via, F. (author)

Published in:

MATERIALS SCIENCE FORUM ; 389/393 ; 655-658

Publication date:

2002-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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