TiNi Thin Films for Microactuators and Microdevices: Sputter Deposition and Processing Techniques: Fid-Bau Portal

TiNi Thin Films for Microactuators and Microdevices: Sputter Deposition and Processing Techniques

Martynov, V.

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TiNi Thin Films for Microactuators and Microdevices: Sputter Deposition and Processing Techniques

Martynov, V.

TiNi Thin Films for Microactuators and Microdevices: Sputter Deposition and Processing Techniques

Martynov, V.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

TiNi Thin Films for Microactuators and Microdevices: Sputter Deposition and Processing Techniques

Contributors:

Martynov, V. (author)

Published in:

MATERIALS SCIENCE FORUM ; 426/432 ; 3475-3480

Publication date:

2003-01-01

Size:

6 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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