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Preparation and Properties of SiO~2 Thin Films Derived from Polysilanes Treated with Oxygen Plasma
Preparation and Properties of SiO~2 Thin Films Derived from Polysilanes Treated with Oxygen Plasma
Preparation and Properties of SiO~2 Thin Films Derived from Polysilanes Treated with Oxygen Plasma
Peng, Z. J. (author) / Si, W. J. (author) / Xie, M. N. (author) / Fu, H. J. (author) / Lin, S. W. (author) / Miao, H. Z. (author) / Gong, J. / Pan, W.
2002-01-01
6 pages
Article (Journal)
English
DDC:
620.11
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