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Relief of the internal stress in ternary boron carbonitride thin films

He, D. / Cheng, W. / Qin, J. / Yue, J. / Xie, E. / Chen, G.

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Relief of the internal stress in ternary boron carbonitride thin films

He, D. / Cheng, W. / Qin, J. / Yue, J. / Xie, E. / Chen, G.

Relief of the internal stress in ternary boron carbonitride thin films

He, D. / Cheng, W. / Qin, J. / Yue, J. / Xie, E. / Chen, G.

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Order at Subito €

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Document information

Title:

Relief of the internal stress in ternary boron carbonitride thin films

Contributors:

He, D. (author) / Cheng, W. (author) / Qin, J. (author) / Yue, J. (author) / Xie, E. (author) / Chen, G. (author)

Published in:

APPLIED SURFACE SCIENCE ; 191 ; 338-343

Publication date:

2002-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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