Fachinformationsdienst BAUdigital

A platform for research: civil engineering, architecture and urbanism

    Characterization of PECVD boron carbonitride layers

    New search for: Thamm, T.
    New search for: Korner, K. U.
    New search for: Bohne, W.
    New search for: Strub, E.
    New search for: Rohrich, J.
    New search for: Stockel, S.
    New search for: Marx, G.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Characterization of PECVD boron carbonitride layers

    New search for: Thamm, T.
    New search for: Korner, K. U.
    New search for: Bohne, W.
    New search for: Strub, E.
    New search for: Rohrich, J.
    New search for: Stockel, S.
    New search for: Marx, G.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Characterization of PECVD boron carbonitride layers

    New search for: Thamm, T.
    New search for: Korner, K. U.
    New search for: Bohne, W.
    New search for: Strub, E.
    New search for: Rohrich, J.
    New search for: Stockel, S.
    New search for: Marx, G.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Characterization of PECVD boron carbonitride layers

    Contributors:

    Thamm, T. (author) / Korner, K. U. (author) / Bohne, W. (author) / Strub, E. (author) / Rohrich, J. (author) / Stockel, S. (author) / Marx, G. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 252 ; 223-226

    Publication date:

    2005-01-01

    Size:

    4 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

    Similar titles

    Mechanical stresses in silicon carbonitride films obtained by PECVD from hexamethyldisilazane

    Shayapov, V. R. / Rumyantsev, Y. M. / Dzyuba, A. A. et al. | British Library Online Contents | 2013

    Structural and optical properties of amorphous hydrogenated silicon carbonitride films produced by PECVD

    Vassallo, E. / Cremona, A. / Ghezzi, F. et al. | British Library Online Contents | 2006

    Boron carbonitride films deposited by pulsed laser ablation

    Perrone, A. / Caricato, A. P. / Luches, A. et al. | British Library Online Contents | 1998

    Synthesis of Boron Carbonitride Films by Plasma-Based Ion Implantation

    Xu, S.Y. / Ma, X.X. / Sun, M.R. | British Library Online Contents | 2007

    Monodispersed boron carbonitride hollow spheres with high-performance microwave absorption property

    Zhang, T. / Wen, G. / Wang, Y.P. et al. | British Library Online Contents | 2016

    Back to top