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    Crack initiation at free edge of interface between thin films in advanced LSI

    New search for: Kitamura, T.
    New search for: Shibutani, T.
    New search for: Ueno, T.

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    Crack initiation at free edge of interface between thin films in advanced LSI

    New search for: Kitamura, T.
    New search for: Shibutani, T.
    New search for: Ueno, T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Crack initiation at free edge of interface between thin films in advanced LSI

    New search for: Kitamura, T.
    New search for: Shibutani, T.
    New search for: Ueno, T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

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    Document information
    Title:

    Crack initiation at free edge of interface between thin films in advanced LSI

    Contributors:

    Kitamura, T. (author) / Shibutani, T. (author) / Ueno, T. (author)

    Published in:

    ENGINEERING FRACTURE MECHANICS ; 69 ; 1289-1299

    Publication date:

    2002-01-01

    Size:

    11 pages

    ISSN:

    0013-7944

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.1 / 126

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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