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Crack initiation at free edge of interface between thin films in advanced LSI
Crack initiation at free edge of interface between thin films in advanced LSI
Crack initiation at free edge of interface between thin films in advanced LSI
Kitamura, T. (Autor:in) / Shibutani, T. (Autor:in) / Ueno, T. (Autor:in)
ENGINEERING FRACTURE MECHANICS ; 69 ; 1289-1299
01.01.2002
11 pages
Aufsatz (Zeitschrift)
Englisch
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