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    Surface study of thin film gas sensors on a Si micro-machined substrate

    New search for: Casaletto, M. P.
    New search for: Kaciulis, S.
    New search for: Mattogno, G.
    New search for: Pandolfi, L.
    New search for: Scavia, G.
    New search for: Dori, L.
    New search for: Nicoletti, S.
    New search for: Severi, M.
    New search for: Zampolli, S.

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    Surface study of thin film gas sensors on a Si micro-machined substrate

    New search for: Casaletto, M. P.
    New search for: Kaciulis, S.
    New search for: Mattogno, G.
    New search for: Pandolfi, L.
    New search for: Scavia, G.
    New search for: Dori, L.
    New search for: Nicoletti, S.
    New search for: Severi, M.
    New search for: Zampolli, S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Surface study of thin film gas sensors on a Si micro-machined substrate

    New search for: Casaletto, M. P.
    New search for: Kaciulis, S.
    New search for: Mattogno, G.
    New search for: Pandolfi, L.
    New search for: Scavia, G.
    New search for: Dori, L.
    New search for: Nicoletti, S.
    New search for: Severi, M.
    New search for: Zampolli, S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Surface study of thin film gas sensors on a Si micro-machined substrate

    Contributors:

    Casaletto, M. P. (author) / Kaciulis, S. (author) / Mattogno, G. (author) / Pandolfi, L. (author) / Scavia, G. (author) / Dori, L. (author) / Nicoletti, S. (author) / Severi, M. (author) / Zampolli, S. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 189 ; 39-52

    Publication date:

    2002-01-01

    Size:

    14 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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