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    Thermochemical process occurring in PLD-derived SiC films during vacuum annealing

    New search for: Wang, Y.
    New search for: He, H.
    New search for: Wang, L.
    New search for: Liu, D.
    New search for: Tang, H.

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    Thermochemical process occurring in PLD-derived SiC films during vacuum annealing

    New search for: Wang, Y.
    New search for: He, H.
    New search for: Wang, L.
    New search for: Liu, D.
    New search for: Tang, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Thermochemical process occurring in PLD-derived SiC films during vacuum annealing

    New search for: Wang, Y.
    New search for: He, H.
    New search for: Wang, L.
    New search for: Liu, D.
    New search for: Tang, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Thermochemical process occurring in PLD-derived SiC films during vacuum annealing

    Contributors:

    Wang, Y. (author) / He, H. (author) / Wang, L. (author) / Liu, D. (author) / Tang, H. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 193 ; 204-209

    Publication date:

    2002-01-01

    Size:

    6 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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