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The mean projected ranges, range stragglings and lateral spreads of Er, Nd ions implanted in Si1N1.375H0.603
The mean projected ranges, range stragglings and lateral spreads of Er, Nd ions implanted in Si1N1.375H0.603
The mean projected ranges, range stragglings and lateral spreads of Er, Nd ions implanted in Si1N1.375H0.603
Wang, F. X. (author) / Lu, F. (author) / Hu, H. (author) / Chen, F. (author) / Zhang, J. H. (author) / Lu, Q. M. (author)
APPLIED SURFACE SCIENCE ; 195 ; 48-52
2002-01-01
5 pages
Article (Journal)
English
DDC:
621.35
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