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The mean projected range and range straggling of Xe ions implanted in Si and Si~1N~1~-~3~7~5H~0~.~6~0~3
The mean projected range and range straggling of Xe ions implanted in Si and Si~1N~1~-~3~7~5H~0~.~6~0~3
The mean projected range and range straggling of Xe ions implanted in Si and Si~1N~1~-~3~7~5H~0~.~6~0~3
Wang, K.-M. (author) / Shi, B.-R. (author) / Guo, H.-Y. (author) / Wei-Wang (author) / Ding, P.-J. (author) / Balkanski, M. / Kamimura, H. / Mahajan, S.
1996-01-01
6 pages
Article (Journal)
English
DDC:
620.11
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