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    Bias voltage influence on surface morphology of titanium nitride synthesized by dynamic nitrogen and titanium plasma immersion ion implantation and deposition

    New search for: Tian, X.
    New search for: Wang, L.
    New search for: Fu, R. K.
    New search for: Chu, P. K.

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    Bias voltage influence on surface morphology of titanium nitride synthesized by dynamic nitrogen and titanium plasma immersion ion implantation and deposition

    New search for: Tian, X.
    New search for: Wang, L.
    New search for: Fu, R. K.
    New search for: Chu, P. K.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Bias voltage influence on surface morphology of titanium nitride synthesized by dynamic nitrogen and titanium plasma immersion ion implantation and deposition

    New search for: Tian, X.
    New search for: Wang, L.
    New search for: Fu, R. K.
    New search for: Chu, P. K.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Bias voltage influence on surface morphology of titanium nitride synthesized by dynamic nitrogen and titanium plasma immersion ion implantation and deposition

    Contributors:

    Tian, X. (author) / Wang, L. (author) / Fu, R. K. (author) / Chu, P. K. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING A -LAUSANNE- ; 337 ; 236 - 240

    Publication date:

    2002-01-01

    Size:

    5 pages

    ISSN:

    0921-5093

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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