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Structural and physical properties of thin copper films deposited on porous silicon

Ghosh, S. / Hong, K. / Lee, C.

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Structural and physical properties of thin copper films deposited on porous silicon

Ghosh, S. / Hong, K. / Lee, C.

Structural and physical properties of thin copper films deposited on porous silicon

Ghosh, S. / Hong, K. / Lee, C.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Structural and physical properties of thin copper films deposited on porous silicon

Contributors:

Ghosh, S. (author) / Hong, K. (author) / Lee, C. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 96 ; 53-59

Publication date:

2002-01-01

Size:

7 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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