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Deposition of MgO films by pulsed mid-frequency magnetron sputtering

Cheng, Y. H. / Kupfer, H. / Richter, F. / Paraian, A. M.

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Deposition of MgO films by pulsed mid-frequency magnetron sputtering

Cheng, Y. H. / Kupfer, H. / Richter, F. / Paraian, A. M.

Deposition of MgO films by pulsed mid-frequency magnetron sputtering

Cheng, Y. H. / Kupfer, H. / Richter, F. / Paraian, A. M.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Deposition of MgO films by pulsed mid-frequency magnetron sputtering

Contributors:

Cheng, Y. H. (author) / Kupfer, H. (author) / Richter, F. (author) / Paraian, A. M. (author)

Published in:

APPLIED SURFACE SCIENCE ; 200 ; 117-124

Publication date:

2002-01-01

Size:

8 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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