Excimer laser micromachining of TiN films from chromium and copper sacrificial layers: Fid-Bau Portal

Excimer laser micromachining of TiN films from chromium and copper sacrificial layers

Dowling, A. J. / Ghantasala, M. K. / Hayes, J. P. / Harvey, E. C. / Doyle, E. D.

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Excimer laser micromachining of TiN films from chromium and copper sacrificial layers

Dowling, A. J. / Ghantasala, M. K. / Hayes, J. P. / Harvey, E. C. / Doyle, E. D.

Excimer laser micromachining of TiN films from chromium and copper sacrificial layers

Dowling, A. J. / Ghantasala, M. K. / Hayes, J. P. / Harvey, E. C. / Doyle, E. D.

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Check availability in my library

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Document information

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Document information

Title:

Excimer laser micromachining of TiN films from chromium and copper sacrificial layers

Contributors:

Dowling, A. J. (author) / Ghantasala, M. K. (author) / Hayes, J. P. (author) / Harvey, E. C. (author) / Doyle, E. D. (author)

Published in:

SMART MATERIALS AND STRUCTURES ; 11 ; 715-721

Publication date:

2002-01-01

Size:

7 pages

ISSN:

0964-1726

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 530

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