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    Preparation of SiNx film by pulsed laser ablation in nitrogen gas ambient

    New search for: Umezu, I.
    New search for: Yamaguchi, T.
    New search for: Kohno, K.
    New search for: Inada, M.
    New search for: Sugimura, A.

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    Preparation of SiNx film by pulsed laser ablation in nitrogen gas ambient

    New search for: Umezu, I.
    New search for: Yamaguchi, T.
    New search for: Kohno, K.
    New search for: Inada, M.
    New search for: Sugimura, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Preparation of SiNx film by pulsed laser ablation in nitrogen gas ambient

    New search for: Umezu, I.
    New search for: Yamaguchi, T.
    New search for: Kohno, K.
    New search for: Inada, M.
    New search for: Sugimura, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

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    Document information
    Title:

    Preparation of SiNx film by pulsed laser ablation in nitrogen gas ambient

    Contributors:

    Umezu, I. (author) / Yamaguchi, T. (author) / Kohno, K. (author) / Inada, M. (author) / Sugimura, A. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 197-198 ; 376-378

    Publication date:

    2002-01-01

    Size:

    3 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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