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    Pulsed laser ablation of silicon with low laser fluence in a low-pressure of ammonia ambient

    New search for: Choo, C. K.
    New search for: Tohara, M.
    New search for: Enomoto, K.
    New search for: Tanaka, K.

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    Pulsed laser ablation of silicon with low laser fluence in a low-pressure of ammonia ambient

    New search for: Choo, C. K.
    New search for: Tohara, M.
    New search for: Enomoto, K.
    New search for: Tanaka, K.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Pulsed laser ablation of silicon with low laser fluence in a low-pressure of ammonia ambient

    New search for: Choo, C. K.
    New search for: Tohara, M.
    New search for: Enomoto, K.
    New search for: Tanaka, K.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Pulsed laser ablation of silicon with low laser fluence in a low-pressure of ammonia ambient

    Contributors:

    Choo, C. K. (author) / Tohara, M. (author) / Enomoto, K. (author) / Tanaka, K. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 228 ; 120-127

    Publication date:

    2004-01-01

    Size:

    8 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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