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Phosphorus-doped Si nanocrystallites embedded in SiO2 films

Makimura, T. / Yamamoto, Y. / Mitani, S. / Mizuta, T. / Li, C. Q. / Takeuchi, D. / Murakami, K.

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Phosphorus-doped Si nanocrystallites embedded in SiO2 films

Makimura, T. / Yamamoto, Y. / Mitani, S. / Mizuta, T. / Li, C. Q. / Takeuchi, D. / Murakami, K.

Phosphorus-doped Si nanocrystallites embedded in SiO2 films

Makimura, T. / Yamamoto, Y. / Mitani, S. / Mizuta, T. / Li, C. Q. / Takeuchi, D. / Murakami, K.

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Document information

Title:

Phosphorus-doped Si nanocrystallites embedded in SiO2 films

Contributors:

Makimura, T. (author) / Yamamoto, Y. (author) / Mitani, S. (author) / Mizuta, T. (author) / Li, C. Q. (author) / Takeuchi, D. (author) / Murakami, K. (author)

Published in:

APPLIED SURFACE SCIENCE ; 197-198 ; 670-673

Publication date:

2002-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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