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Interfacial and microstructural properties of zirconium oxide thin films prepared directly on silicon

Zhang, N. L. / Song, Z. T. / Wan, Q. / Shen, Q. W. / Lin, C. L.

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Interfacial and microstructural properties of zirconium oxide thin films prepared directly on silicon

Zhang, N. L. / Song, Z. T. / Wan, Q. / Shen, Q. W. / Lin, C. L.

Interfacial and microstructural properties of zirconium oxide thin films prepared directly on silicon

Zhang, N. L. / Song, Z. T. / Wan, Q. / Shen, Q. W. / Lin, C. L.

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Document information

Title:

Interfacial and microstructural properties of zirconium oxide thin films prepared directly on silicon

Contributors:

Zhang, N. L. (author) / Song, Z. T. (author) / Wan, Q. (author) / Shen, Q. W. (author) / Lin, C. L. (author)

Published in:

APPLIED SURFACE SCIENCE ; 202 ; 126-130

Publication date:

2002-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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