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Ultra thin silicon films directly bonded onto silicon wafers

Fournel, F. / Moriceau, H. / Magnea, N. / Eymery, J. / Rouviere, J. L. / Rousseau, K. / Aspar, B.

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Ultra thin silicon films directly bonded onto silicon wafers

Fournel, F. / Moriceau, H. / Magnea, N. / Eymery, J. / Rouviere, J. L. / Rousseau, K. / Aspar, B.

Ultra thin silicon films directly bonded onto silicon wafers

Fournel, F. / Moriceau, H. / Magnea, N. / Eymery, J. / Rouviere, J. L. / Rousseau, K. / Aspar, B.

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Document information

Title:

Ultra thin silicon films directly bonded onto silicon wafers

Contributors:

Fournel, F. (author) / Moriceau, H. (author) / Magnea, N. (author) / Eymery, J. (author) / Rouviere, J. L. (author) / Rousseau, K. (author) / Aspar, B. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 73 ; 42 - 46

Publication date:

2000-01-01

Size:

5 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Rousseau, K. / Rouviere, J. L. / Fournel, F. et al. | British Library Online Contents | 2001

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Reiche, M. / Tong, Q.-Y. / Goesele, U. et al. | British Library Online Contents | 1995

Silicon oxide in Si&z.sbnd;Si bonded wafers

Himcinschi, C. / Milekhin, A. / Friedrich, M. et al. | British Library Online Contents | 2001

Microscopic Structure of Directly Bonded Silicon Substrates

Kato, T. / Ohara, Y. / Ueda, T. et al. | British Library Online Contents | 2011