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    Tribological Coatings for LIGA MEMS

    New search for: Prasad, S.
    New search for: Christenson, T.
    New search for: Dugger, M.

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    Tribological Coatings for LIGA MEMS

    New search for: Prasad, S.
    New search for: Christenson, T.
    New search for: Dugger, M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Tribological Coatings for LIGA MEMS

    New search for: Prasad, S.
    New search for: Christenson, T.
    New search for: Dugger, M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Tribological Coatings for LIGA MEMS

    Contributors:

    Prasad, S. (author) / Christenson, T. (author) / Dugger, M. (author)

    Published in:

    ADVANCED MATERIALS AND PROCESSES ; 160 ; 30-34

    Publication date:

    2002-01-01

    Size:

    5 pages

    ISSN:

    0882-7958

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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