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    A resonance photoionization sputtered neutral mass spectrometry instrument for submicron microarea analysis of ULSI devices

    New search for: Shichi, H.
    New search for: Osabe, S.
    New search for: Sugaya, M.
    New search for: Ino, T.
    New search for: Kakibayashi, H.
    New search for: Kanehori, K.
    New search for: Mitsui, Y.

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    A resonance photoionization sputtered neutral mass spectrometry instrument for submicron microarea analysis of ULSI devices

    New search for: Shichi, H.
    New search for: Osabe, S.
    New search for: Sugaya, M.
    New search for: Ino, T.
    New search for: Kakibayashi, H.
    New search for: Kanehori, K.
    New search for: Mitsui, Y.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    A resonance photoionization sputtered neutral mass spectrometry instrument for submicron microarea analysis of ULSI devices

    New search for: Shichi, H.
    New search for: Osabe, S.
    New search for: Sugaya, M.
    New search for: Ino, T.
    New search for: Kakibayashi, H.
    New search for: Kanehori, K.
    New search for: Mitsui, Y.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    A resonance photoionization sputtered neutral mass spectrometry instrument for submicron microarea analysis of ULSI devices

    Contributors:

    Shichi, H. (author) / Osabe, S. (author) / Sugaya, M. (author) / Ino, T. (author) / Kakibayashi, H. (author) / Kanehori, K. (author) / Mitsui, Y. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 203-204 ; 228-234

    Publication date:

    2003-01-01

    Size:

    7 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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